MIE Seminar: Talk by Professor Gary Fedder - Sep 7, 2011, 11am-12pm, MC310

Dear Chairs and Directors:

On behalf of Dean Amon, it would be appreciated if you could please distribute the attached MIE seminar notice to faculty members within your department/institute for their interest. The seminar talk entitled “Opportunities and Challenges of CMOS MEMS” will be given by Professor Gary Fedder of Carnegie Mellon University on September 7, 2011 at 11:00am to 12:00pm in Room 310 of the Mechanical Engineering Building.

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Seminar Title: Opportunities and Challenges of CMOS MEMS

Speaker: Prof. Gary Fedder, Carnegie Mellon University

Time: 11:00am-12:00pm, Sept. 7, 2011

Location: MC310 (within Mechanical Engineering building)

Abstract: The “More than Moore” trend in the microelectronics industry is driving a renewed interest in mixed-physics microsystem integration with CMOS. Integration becomes a necessity for multi-component microsystems, where wiring between MEMS and electronics scales with MEMS component count. Integration also drives down parasitic capacitances and thus provides opportunities for ultra-low-power and/or ultra-compact microsystems. Present manufacturable fabrication techniques for CMOS MEMS may be placed in two major categories: monolithic integration and chip stacking. Several monolithic integration approaches exist that create MEMS devices from the layers in the back-end-of-line (BEOL) CMOS stack or by adding materials on top of the BEOL stack.

Emerging features in future CMOS MEMS include attributes of re-configurability, selfconfigurability and “self-healing” in the presence of manufacturing and environmental variability. These are general attributes that hold promise of providing high manufacturing yield, resiliency and redundancy for critical applications. One class of such systems are RF circuits tightly integrated with multiple electrothermally actuated MEMS capacitors that lead to a variety of low-loss, frequency reconfigurable circuit blocks. Two other exemplary self-configuring systems are micro-instrumented scanning probe arrays for tip-based nanomanufacturing and selfhealing resonant mixer-filters for RF front-ends.

Gary K. Fedder is Director of the Institute of Complex Engineered Systems, Howard M. Wilkoff Professor of Electrical and Computer Engineering and Professor in The Robotics Institute at Carnegie Mellon University. He received his B.S. and M.S. degrees in electrical engineering from MIT in 1982 and 1984, respectively, and his Ph.D. degree from U. C. Berkeley in 1994. From 1984 to 1989, he worked at Hewlett-Packard on circuit design and printed-circuit modeling. He is an IEEE Fellow and received the 1994 AIME Electronic Materials Society Ross Tucker Award, the 1996 Carnegie Institute of Technology G.T. Ladd Award, and the 1996 NSF CAREER Award. He currently serves as a subject editor for the IEEE/ASME Journal of Microelectromechanical Systems, on the editorial boards of the IoP Journal of Micromechanics and Microengineering and IET Micro & Nano Letters and as coeditor of the Wiley-VCH Advanced Micro- and Nanosystems book series. He has contributed to over 200 research publications and holds several patents in the MEMS area. His research interests include microsensor and microactuator design and modeling, integrated MEMS manufactured in CMOS processes and structured design methodologies for MEMS.